Ласерска модификација алуминијум-титанских и никл-титанских танких слојева
Laser modification of aluminium-titanium and nickel-titanium thin layers
Докторанд
Salatić, Branislav М.Ментор
Pantelić, DejanЧланови комисије
Petrović, SuzanaKuraica, Milorad
Obradović, Bratislav
Метаподаци
Приказ свих података о дисертацијиСажетак
Предмет истраживања ове дисертације су морфолошке и хемијске промене које настају на алуминијум-титанским и никл-титанским танким слојевима...
The main subject of this doctoral thesis is morphological and chemical
changes that occurs on the aluminum-titan and nickel-titan thin films, after the
treatment by nanosecond and picoseconds laser pulses. Aluminum-titan and nickel-titan
multilayer systems are created by alternating deposition of nanometer layers (Al or Ni
and Ti) on a single silicon substrate, by sputter deposition method. The samples were
irradiated by Er:glass and Nd:YAG laser beam, at different intensities of laser radiation,
with different number of pulses (1-20), at different wavelengths (1540 nm, 532 nm,
1064 nm and 1064/532 nm) and at different ambient conditions (air, water and ethanol).
During the irradiation of target, most of the absorbed energy of the laser radiation is
quickly transformed into heat, causing intensive morphological and chemical
modification of the sample. The resulting changes depend on the characteristics of the
laser radiation, material properties and ambient conditions. The study of las...er-induced
changes is important for potential applications of these materials/systems in various
fields of science and technology.
Results of the laser modification of the multilayer systems, depending on the laser
parameters, material properties and ambient conditions, have reflected an increasing
surface roughness of the target, the formation of specific micro- and nanostructures, the
occurrence of morphological characteristics as consequence of the movement of molten
material and the creation craters caused by ablation of material. Laser modification of
samples is accompanied by intensive surface melting of thin layers and possible mixing
the components by thermally activated diffusion with indication of formation of
intermetallic compounds (AlTi и NiTi). Laser-induced modification of aluminumtitanium
and nickel-titanium thin films by two wavelengths simultaneously (1064/532
nm) is reflected in the intensive ablation of materials and formation of deeper and wider
craters, compared to craters obtained at 1064 nm. The numerical model simulates effect
of nanosecond laser pulses on the (Al /Ti)/Si and the (Ni/Ti)/Si multilayered systems,
which is used to predict the depth of ablation and calculation of temperature profiles.
Numerical and experimental results are well matched in the range of laser intensities
used in the present experiment.
Факултет:
Универзитет у Београду, Физички факултетДатум одбране:
02-10-2017Пројекти:
- Моделирање и нумеричке симулације сложених вишечестичних система (RS-MESTD-Basic Research (BR or ON)-171017)