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Proučavanje oblika spektralnih linija Ne I i Ne II u prikatodnoj oblasti abnormalnog tinjavog pražnjenja

The study of ne i and ne ii spectral line shapes in cathode sheath region of an abnormal glow discharge

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2018
Disertacija17513.pdf (11.50Mb)
IzvestajKomisije17513.pdf (190.5Kb)
Author
Ivanović, Nikola V.
Mentor
Šišović, Nikola
Committee members
Šišović, Nikola
Spasojević, Đorđe
Konjević, Đorđe
Videnović, Ivan
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Abstract
Prikatodna oblast predstavlja najvažniji deo tinjavih pražnjenja (TP), jer se u njoj javlјaju različiti procesi relevantni kako za rad tako i za primenu tinjavih pražnjenja. Jedan od najvažnijih parametara prikatodne oblasti je raspodela jačine električnog polјa Е, koја je od presudnog značaja za ubrzanje naelektrisanih čestica, njihove putanje, kinetičke energije i sudare sa drugim česticama, kao i raspršivanje materijala katode. Svi ovi procesi su značajni za rad TP i njegove primene u oblasti spektroskopske analize, depozicije tankih slojeva, kao i dubinskog profiliranja i nagrizanja katodnog materijala plazmom. Prema tome, potpuno je jasna potreba za neperturbujućim tehnikama za merenje raspodele električnog polja Е u uzanoj prikatodnoj oblasti...
The cathode sheath (CS) region is the most important part of an abnormal glow discharge (GD), where various processes relevant for the operation and application occur. One of the most important parameters of CS is the distribution of electric field strength Е, which is of crucial importance for charged particles acceleration, their trajectories, kinetic energies and collisions with other particles and cathode sputtering. All these processes are relevant for the operation of GD as well as for numerous applications in the field of spectroscopic analysis, plasma etching, thin film deposition and depth profiling of cathode material. Thus, the importance of non-perturbing technique for E distribution measurement in a tiny CS region was recognized long time ago...
Faculty:
University of Belgrade, Faculty of Physics
Date:
15-06-2018
Projects:
  • Spectroscopic diagnostics of low-temperature plasma and gas discharge: spectral line shapes and interaction with surfaces (RS-171014)
Keywords:
Optička emisiona spektroskopija / Optical emission spectroscopy / Abnormal glow discharge of the Grimm type / Cathode sheath region / Negative glow region / Macrofield and microfield Stark effect / Spectral line shape / Stark shift measurements / Determination of electric field distribution / Grimovo abnormalno tinjavo pražnjenje / Prikatodna oblast / Oblast negativnog svetljenja / Štarkov efekat makropolja i mikropolja / Oblici spektralnih linija / Merenje Štarkovih pomeraja / Određivanje raspodele električnog polja
[ Google Scholar ]
URI
http://eteze.bg.ac.rs/application/showtheses?thesesId=5947
http://nardus.mpn.gov.rs/handle/123456789/9848
https://fedorakg.kg.ac.rs/fedora/get/o:18111/bdef:Content/download
http://vbs.rs/scripts/cobiss?command=DISPLAY&base=70036&RID=50348303

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