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Nove primene procesa nagrizanja silicijuma u vodenom rastvoru TMAH u izradi MEMS senzora

New applications of silicon wet etching using tmah water solution for fabrication of mems sensors.

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2013
Disertacija3834.pdf (50.03Mb)
Author
Smiljanić, Milče
Mentor
Jakšić, Zoran
Committee members
Tadić, Milan
Mihailović, Peđa
Jović, Vesna
Petričević, Slobodan
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Abstract
U ovom radu prikazani su razvoj i usavršavanje tehnološkog procesa vlažnog anizotropnog hemijskog nagrizanja silicijuma orijentacije (100) u vodenom rastvoru tetrametil-amonijum hidroksida (TMAH) koncentracije 25 tež. % na temperaturi od 800 C. Razvoj maskless tehnike nagrizanja silicijuma u vodenom rastvoru TMAH je odredio kristalografske ravni koje se pojavljuju tokom ove vrste nagrizanja. Preostale kristalografske ravni su određene dodatnim nagrizanjem silicijumskih struktura definisanih kvadratnim likovima sa stranicama projektovanim u različitim kristalografskim pravcima. Određene su brzine nagrizanja uočenih kristalografskih ravni merenjem odgovarajućih parametara. Na osnovu brzina nagrizanja i pojavljivanja i nestajanja uočenih kristalografskih ravni tokom nagrizanja objašnjen je mehanizam nagrizanja u vodenom rastvoru TMAH koncentracije 25 tež. % na temperaturi od 800 C. Mehanizam anizotropnog nagrizanja silicijuma u vodenom rastvoru TMAH definisao je ograničenja tehnološkog pr...ocesa. Razvijene su tehnike kompenzacije konveksnih i konkavnih uglova i tehnika maskless nagrizanja čiji je cilj prevazilaženje uočenih ograničenja. Prikazane su primene osvojenih tehnika nagrizanja u vodenom rastvoru TMAH u izradi različitih trodimenzionalnih silicijumskih struktura, u izradi novih MEMS senzora i poboljšavanju postojećih senzorskih struktura

This dissertation presents the development and improvement of the technological process of wet anisotropic chemical etching in a 25 wt % TMAH water solution at а temperature of 800 C of a (100) silicon substrate. The development of a maskless etching technique in TMAH water solution has determined all the silicon crystallographic planes that appeared during this type of etching. The remaining crystallographic planes were determined by additional etching of silicon structures that had been defined by square islands with the sides designed along various crystallographic directions. The etch rates of all exposed planes have been calculated by measuring the time dependence of the appropriate parameters. Various silicon crystallographic planes have different etch rates and some planes disappear while others appear during etching. Based on these facts, a mechanism of wet silicon etching in 25 wt % TMAH water solution at a temperature of 800 C is explained. The mechanism of anisotropic etchin...g in TMAH water solution has determined the limitations of this technological process. Convex corner compensation, concave corner compensation and maskless techniques were developed to overcome the observed limitations. As examples of the developed techniques in TMAH water solution, various 3D silicon structures, new and improved MEMS sensors structures have been fabricated.

Faculty:
Универзитет у Београду, Електротехнички факултет
Date:
24-10-2013
Projects:
  • Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
Keywords:
Silicijum / Silicon / TMAH / wet chemical etching / crystallographic planes / MEMS / sensor / TMAH / vlažno hemijsko nagrizanje / kristalografske ravni / MEMS / senzor
[ Google Scholar ]
Handle
https://hdl.handle.net/21.15107/rcub_nardus_5828
URI
http://eteze.bg.ac.rs/application/showtheses?thesesId=3279
https://nardus.mpn.gov.rs/handle/123456789/5828
https://fedorabg.bg.ac.rs/fedora/get/o:11701/bdef:Content/download
http://vbs.rs/scripts/cobiss?command=DISPLAY&base=70036&RID=45330191

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