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Structural and optical properties of plasmonic silver nanoparticles formed by ion bombardment of monocrystalline silicon

dc.contributor.advisorNovaković, Mirjana
dc.contributor.otherDojčilović, Jablan
dc.contributor.otherPopović, Dušan
dc.creatorModrić-Šahbazović, Almedina
dc.date.accessioned2021-05-07T12:48:25Z
dc.date.available2021-05-07T12:48:25Z
dc.date.issued2020-11-28
dc.identifier.urihttp://eteze.bg.ac.rs/application/showtheses?thesesId=8105
dc.identifier.urihttps://fedorabg.bg.ac.rs/fedora/get/o:23606/bdef:Content/download
dc.identifier.urihttp://vbs.rs/scripts/cobiss?command=DISPLAY&base=70036&RID=37352713
dc.identifier.urihttps://nardus.mpn.gov.rs/handle/123456789/18285
dc.description.abstractDisertacija se bavi ispitivanjem strukturnih i optičkih svojstava nanočestica srebra u monokristalnom silicijumu, dobijenih metodom jonske implantacije. Monokristalne Si (100) podloge su modifikovane nisko-energijskim jonima srebra u procesu jednostrukih implantacija (60 keV i 75 keV) i višestrukih implantacija (75 keV + 60 keV), u opsegu jonskih doza 1013 -1016 jona/cm2 . Odabrani uzorci su zatim odgrijavani na temperaturama od 500°C, 600°C i 700°C. Struktura i fazni sastav uzoraka su analizirani transmisionom elektronskom mikroskopijom, fotoemisionom spektroskopijom X-zracima i spektrometrijom Rutherford-ovim povratnim rasijanjem. Optička svojstva modifikovanih Si podloga i promjene u položaju karakteristične rezonancije površinskog plazmona (SPR) određeni su iz elipsometrijskih mjerenja. Pokazano je da se definisanjem parametara implantacije (doze implantacije i energije jona) mogu postići uslovi za formiranje uniformno raspoređenih Ag nanočestica u pod-površinskoj oblasti Si matrice. Uzorci su pokazali prisustvo intenzivnog SPR maksimuma u oblasti većih talasnih dužina (>650 nm). Promjene u strukturnim svojstvima, kao što su broj i veličina Ag čestica i stepen oštećenja Si matrice, indukovane jonskim snopom direktno se manifestuju na oblik i položaj SPR maksimuma nanočestica srebra. Eksperimentalno uočene promjene položaja SPR maksimuma su poređene sa teorijskim vrijednostima, predviđenim Mie-ovom i Maxwell-Garnett-ovom teorijom. Odstupanje od teorijskih SPR položaja se može objasniti snažnim efektom okolne matrice, koji nije uključen u teorijske analize. Konačno, predstavljeni su rezultati nanostrukturiranja Si podloga korišćenjem metode selektivne jonske modifikacije (implantacijom kroz polistirensku nanomasku) i ispitana optička svojstva ovako formiranih sistema.sr
dc.description.abstractThe dissertation deals with the structural and optical properties of silver nanoparticles formed in monocrystalline silicon by using ion implantation process. Monocrystalline Si (100) substrates were modified by single (60 keV and 75 keV) or multiple (75 keV + 60 keV) low energy silver ion irradiation with fluences in the range 1013 -1016 ions/cm2 . Selected samples were then annealed at 500°C, 600°C and 700°C. Structural and compositional characterization of the samples was done by transmission electron microscopy, X-ray photoelectron spectroscopy and Rutherford backscattering spectrometry. The optical properties of the irradiated Si substrates and the position of the surface plasmon resonance peak (SPR) were determined from ellipsometric measurements. By defining implantation parameters (irradiation fluence and ion energy) conditions for the formation of uniformly distributed Ag nanoparticles in the sub-surface region of Si could be achieved. The samples showed the presence of an intense SPR peak in the high-wavelengths region (> 650 nm). Changes in structural properties, such as the number and size of Ag particles and also the ion-beam induced damage in Si substrate directly impact the shape and position of the SPR peak of silver nanoparticles. The experimentally observed changes in the SPR peak position are compared with the theoretical values predicted by Mie's and Maxwell-Garnett's theory. The deviation from the theoretical SPR positions can be explained by the strong effect of the surrounding medium, which is not included in the theoretical predictions. Finally, the results of nanostructuring of Si substrates using the selective ion-beam modification method (implantation through polystyrene nanomask) are presented together with the optical properties examination.en
dc.formatapplication/pdf
dc.languagesr
dc.publisherУниверзитет у Београду, Физички факултетsr
dc.relationinfo:eu-repo/grantAgreement/MESTD/Integrated and Interdisciplinary Research (IIR or III)/45005/RS//
dc.rightsopenAccessen
dc.sourceУниверзитет у Београдуsr
dc.subjectsilicijumsr
dc.subjectsiliconen
dc.subjectjonska implantacijasr
dc.subjectAg nanočesticesr
dc.subjectspektroskopska elipsometrijasr
dc.subjectSPR efekatsr
dc.subjectPS nanomaskasr
dc.subjectTEMsr
dc.subjectRBSsr
dc.subjectXPSsr
dc.subjection implantationen
dc.subjectAg nanoparticlesen
dc.subjectspectroscopic ellipsometryen
dc.subjectSPR effecten
dc.subjectPS nanomasken
dc.subjectTEMen
dc.subjectRBSen
dc.subjectXPSen
dc.titleStrukturna i optička svojstva plazmonskih nanočestica srebra dobijenih jonskim bombardovanjem monokristalnog silicijumasr
dc.title.alternativeStructural and optical properties of plasmonic silver nanoparticles formed by ion bombardment of monocrystalline siliconen
dc.typePhD thesis
dc.rights.licenseBY-NC-ND
dc.identifier.fulltexthttp://nardus.mpn.gov.rs/bitstream/id/71300/Disertacija.pdf
dc.identifier.fulltexthttp://nardus.mpn.gov.rs/bitstream/id/71301/IzvestajKomisije28682.pdf
dc.identifier.rcubhttps://hdl.handle.net/21.15107/rcub_nardus_18285


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