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Modelovanje proboja u gasovima Monte Karlo tehnikom

Modeling of a gas breakdown by Monte Carlo technique

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2019
Disertacija.pdf (11.59Mb)
IzvestajKomisije21626.pdf (2.392Mb)
Author
Puač, Marija
Mentor
Petrović, Zoran Lj.
Committee members
Cvetić, Jovan
Đorđević, Antonije
Metadata
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Abstract
Zbog velike zastupljenosti radiofrekvencijskih (RF) plazmi u industriji javila se potreba za definisanjem osnovnih fizičkih principa koji određuju proboj u RF električnim poljima. Uslovi, u vidu probojnog napona i pritiska, mogu se prikazati naponskom probojnom krivom, predstavljenom u V-p ravni. Oblik i položaj krive definisani su kako prirodom pozadinskog gasa tako i karakteristikama spoljašnjeg RF električnog izvora. Ova disertacija ima za cilj da nedvosmisleno definiše fizičke procese koji su odgovorni za proboj pri RF električnim poljima. Za to je korišćena Monte Karlo tehnika. Odabirom slučajnih brojeva, uz poznavanje preseka za određene procese, moguće je verno (čak se može tvrditi egzaktno) opisati kretanje roja naelektrisanih čestica između dve elektrode koje su pobuđene RF generatorom. Izgradnja modela je započeta posmatranjem kretanja elektrona u argonu pri frekvenciji od 13,56 MHz. Na primeru argona objašnjeni su osnovni mehanizmi proboja koji definišu oblik naponske proboj...ne krive. Nadogradnja modela, kao verodostojne predstave RF proboja, uključuje efekte na površinama elektroda (refleksiju i emisiju sekundarnih elektrona), uticaj promene frekvencije i dvofrekvencijskih izvora, kao i teških čestica. Model je primenjen na različite gasove: helijum, kiseonik, sintetički vazduh i atmosfera Marsa.

The wide range of radiofrequency (RF) plasma applications in industry rely on research of fundamental physical processes responsible for the RF breakdown. Conditions, such as the breakdown voltage and pressure, can be presented by breakdown voltage curves in the V-p plane. The shape and coordinates of the curve are defined by the nature of the background gas and characteristics of the applied RF electric field. The goal of this dissertation is to define physical processes responsible for the RF breakdown. For that purpose a Monte Carlo computational code has been used. If one knows cross sections for different processes by employing a random number generator, the transport of electrons between two electrodes can be determined. The development of the RF breakdown model begun by observing the motion of electrons in argon at the field frequency of 13.56 MHz. Argon was used to explain the basic mechanisms that define the shape of the breakdown voltage curve. Further upgrade of the model in...volved inclusion of the surface effects on electrodes (reflection and secondary electron emission), the influence of frequency and dual frequency RF power supplies, as well as the influence of heavy particles on the breakdown. The model was applied to different gases: helium, oxygen, and synthetic air, as well as the atmosphere of Mars.

Faculty:
Универзитет у Београду, Електротехнички факултет
Date:
10-07-2019
Keywords:
radiofrekvencijski proboj / Radiofrequency breakdown / Radiofrequency plasma / Charged particles transport / Monte Carlo technique / radiofrekvencijske plazme / kretanje naelektrisanih čestica / Monte Karlo tehnika
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Handle
https://hdl.handle.net/21.15107/rcub_nardus_11749
URI
https://nardus.mpn.gov.rs/handle/123456789/11749
http://eteze.bg.ac.rs/application/showtheses?thesesId=7126
https://fedorabg.bg.ac.rs/fedora/get/o:20797/bdef:Content/download
http://vbs.rs/scripts/cobiss?command=DISPLAY&base=70036&RID=51823887

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