Show simple item record

Polyimide structures for micro-electro-mechanical system (mems) - based applications.

dc.contributor.advisorPopović, Ivanka
dc.contributor.advisorRajaković, Ljubinka
dc.contributor.otherRadojević, Vesna
dc.contributor.otherKalagasidis-Krušić, Melina
dc.contributor.otherJović, Vesna
dc.creatorĐakov, Tatjana A.
dc.date.accessioned2017-02-27T10:10:25Z
dc.date.available2017-02-27T10:10:25Z
dc.date.issued2016-09-26
dc.identifier.urihttp://eteze.bg.ac.rs/application/showtheses?thesesId=4620
dc.identifier.urihttps://fedorabg.bg.ac.rs/fedora/get/o:14753/bdef:Content/download
dc.identifier.urihttp://vbs.rs/scripts/cobiss?command=DISPLAY&base=70036&RID=48697871
dc.identifier.urihttp://nardus.mpn.gov.rs/123456789/7656
dc.description.abstractU okviru ove doktorske disertacije proučena je i eksperimentalno ispitana mogućnost primene tankih polimernih filmova kao zamene za silicijum kod bimorfnih MEMS struktura. Ponašanje deformabilnih bimorfnih MEMS struktura (oblik, položaj u mirovanju i u stanju pobude) veoma zavisi od termomehaničkih karakteristika samih strukturnih materijala, a koje samim tim imaju uticaja i na vreme odziva, efikasnost i primenjenu snagu i/ili osetljivost. Prvi put su u radu ispitivane toplotne karakteristike (koeficijent toplotnog širenja, , i temperatura prelaza u staklasto stanje, Tg) tankih poliimidnih filmova (2 m - 10 m) u zavisnosti od debljine filma i procesnih parametara (temperature umrežavanja, kao i temperaturnog profila koji je korišćen pri umrežavanju polimera). Na osnovu eksperimentalnih podataka izvedene su korelacije izmeĎu debljine filma i koeficijenta toplotnog širenja, , kao i temperature prelaza u staklasto stanje, Tg. Pomoću toplotnih karakteristika PI filmova izvršena je simulacija, funkcionalizacija i modelovanje nove generacije bimorfnih mikrosenzora i mikropokretača tipa metal - poliimid i poliimid - poliimid...sr
dc.description.abstractThis Ph.D. thesis studies and experimentally examines applicability of thin polymer films as structural substitutes for crystaline Si in bimorph MEMS structures. The two shapes (bi - morph) and transient state between the ON - OFF resting positions, that such deformable MEMS structures assume, largely depend on thermo-mechanical characteristics of the structural materials, influencing response time, efficiency and delivered force and/or sensitivity. For the first time, thermal characteristics (e.g. Coefficent of Thermal Expansion (CTE)  and the Glass Transient Temperature Tg) of trully thin (2m – 10m) polyimide (PI) films have been examined and the relationship with respect to film thickness and film coating processing parameters (e.g. soft - baking and hard-baking temperature profiles) has been established. The correlations between the film thickness and respective CTEs - , as well as respective glass transition temperatures, Tgs have been experimentally established. Experimentally established thermo - mechanical characteristics of PI films were then used for software simulation, functionalisation and modelling of the next generation of bimorph microsensors and microactuators based on PI - metal and PI - PI architecture...en
dc.formatapplication/pdf
dc.languagesr
dc.publisherУниверзитет у Београду, Технолошко-металуршки факултетsr
dc.rightsAutorstvo-Nekomercijalno-Bez prerade 3.0 Srbija (CC BY-NC-ND 3.0)
dc.sourceУниверзитет у Београдуsr
dc.subjectTanki polimerni filmovisr
dc.subjectThin polymer filmsen
dc.subjectpoliimidsr
dc.subjectmikro-elektro-mehanički sistemi (MEMS)sr
dc.subjectbimorfne strukturesr
dc.subjectpolyimideen
dc.subjectmicro-electro-mechanical systems (MEMS)en
dc.subjectbimorph structureen
dc.titlePolimidne konzole za primenu u mikro-elektro-mehaničkim (mems) sistemimasr
dc.title.alternativePolyimide structures for micro-electro-mechanical system (mems) - based applications.en
dc.typePhD thesis
dcterms.abstractРајаковић, Љубинка; Поповић, Иванка; Радојевић, Весна; Јовић, Весна; Калагасидис-Крушић, Мелина; Ђаков, Татјана A.; Полимидне конзоле за примену у микро-електро-механичким (мемс) системима; Полимидне конзоле за примену у микро-електро-механичким (мемс) системима;


Files in this item

Thumbnail
Thumbnail

This item appears in the following Collection(s)

Show simple item record